· With imported six-axis lift to load/unload and ensures high reliability of picking and placing of wafers;·With IPC based running master computer software in HMI, high speed data interaction can be realized by network communication.
· With precise detection components to dectect the dynamic position of the quartz boat to rectifying the positioning.
· With cooling system before the unloading process, which can avoid any harmful effect on the wafers and equipment caused by high temperature.
· The comb,gripper adopt special processing technology which greatly reduce the marks on wafers.
· Cassette can be vertical or horizontal, customer can choose flexibly according to their needs.
· MES function, sheet resistance detection and AGV, optional.