· Automatic Wafer Unloader
· DP-IV: Transfer wafers from the cassette of the previous process to the cassette of next process.
· LXP-IV: Unloading the wafers from the 5/8/10-lane inline cleaning equipment to cassettes.
· With PLC control and the unloading process is completed automatically; Touch-screen operation, which is easy and clear.
· With single lane loading/unloading method which guarantees the loading/unloading productivity and meets the requirement of the wafer production according to batches as well.
· Double workstation, exchanging magazine/cassette no need to interrupt equipment operation.
· Inline/Offline optional.
· Compatible with AGV, RFID, MES function optional.
· With PLC control and the unloading process is completed automatically; touch screen operation, which is easy and clear.
· Breakage detection and treatment before wafer unload to the unloader. (Need extra charges)
· Wafer turnover function, Weight testing function (need extra charges)
· Compatible with AGV,RFID, MES management function.